Turbo Molecular Pump , FF-160/700E , Water cooling, Grease lubrication
KYKY TECHNOLOGY CO., LTD. has many years of experiences in R & D and manufacturing of vacuum generation products, including series molecular pumps, series molecular pump stations, series ion pumps, series gate valves and supporting controllers.
Since developing the first vertical turbo molecular pump in 1970’s, KYKY always orients
to the demand-driven market, aims to meet the requirement of our customers, and continuously launches new products in the enterprise spirit of developing on innovation.
KYKY independently developed grease lubrication turbo pumps as a series of high-performance molecular pumps,
The grease-lubrication pump is equipped with ceramic bearing, which is usually of a self-sealed structure, consisting of a bearing inner ring, a bearing outer ring, balls, holders, a sealing end cover and lubricating grease. Shafting support structure applied to the grease-lubricated ceramic bearing has advantages of simple structure, free maintenance and low power consumption, so that molecular pump products can be installed in any orientation, and only need to be maintained once every 3-5 years in normal operating conditions.
The characteristics of the grease lubrication turbo pump
1. Stable performance.
2. Easy to operate
3. Compact structure,
4. Multiple applications
The applications of grease lubrication turbo pumps are mainly in the fields:
1. solar cells, 2. Low-E glass, 3. ITO glass, 4. accelerators, 5. plasma technology, 6. lamp making, 7. vacuum leak detection
Specifications:
| Flange(In) |
DN160 CF/ISO-K |
| Flange(Out) KF |
DN40 |
| Pumping Speed( L/s) |
N2:700 |
| He:580 |
| H2:260 |
| Ar:680 |
| Compression Ratio |
N2:109 |
| He:107 |
| H2:106 |
| Ar:109 |
| Ultimated Pressure(Pa) |
CF:6×10-8 |
| ISO-K:6×10-7 |
| Max. Continuous Fore-vacuum pressure(Pa) |
300 |
| Max. Fore-vacuum Pressure |
N2:550 |
| Gas Throughout (sccm) |
N2:1400 |
| He:1000 |
| H2:800 |
| Ar:550 |
| Rotation Speed ( rpm) |
36000 |
| Run-Up Time(min) |
≤7 |
| Cooling Type,Standard |
Water |
| Cooling Water Consumption ( L/min) |
≥1 |
| Cooling Water Temperature(℃) |
≤25 |
| Power Connection:Voltage (V AC) |
220±22 |
| Max.Power Consumption (W) |
≤500 |
| Controller Model |
TCDP-II
with 2.5 metet cable |
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Product Tags:
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High Performance Turbomolecular Pump / Turbo Drag Pump Water Cooling Images
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